000 00433nam a2200205Ia 4500
008 201126s9999 xx 000 0 und d
041 _aeng
020 _a9788132204954
082 _a620.5 / CUI
100 _aCUI, ZHENG
245 _aNANOFABRICATION
260 _bSPRINGER
_c2012
300 _a343
690 _aMECHANICAL ENGINEERING
690 _aFET
690 _aAU
690 _aAE
999 _c11068
_d11068
942 0 0 _02